Formation of an Inlet Funnel in the Channels of Microchannel Plates

The article presents a method for one-sided etching of channel openings in unetched microchannel plate blanks using dilute hydrofluoric acid. In this work, we used the blanks of MCP 18-10 microchannel plates. The treatment was carried out in 0.2 N hydrofluoric acid solution at room temperature without oscillating or stirring the solution. Following etching, the diameter of channel openings increased by over 10% of the diameter of MCP 18-10 channels, which increased the electron transmission of the device.