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<p>In an extreme ultraviolet (EUV) vessel, intense heating occurs when a high-power laser irradiates tin droplets, generating extreme thermal pressure gradients that drive complex flow dynamics. This review focuses on two critical aspects governing flow properties and debris transport within the vessel: main shock behavior and thermal expansion dynamics. Key considerations include finite-source shock dynamics, environmental effects on shock propagation, gas contact motion, and interface instabilities. The evolution of the main shock and gas contact is primarily determined by the initial pressure ratio and sound speed ratio between the heat source and ambient gas. Furthermore, Rayleigh-Taylor and Richtmyer-Meshkov instabilities dominate the evolution of gas-gas interfaces. This work presents a comprehensive analysis of the complex flow mechanisms underlying early-stage, high-temperature flow expansion in EUV source vessels.</p>

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Early stage of explosive expansion in extreme ultraviolet source vessel

  • 期刊论文

  • 发表日期：

    2026年2月12日

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  • Qihang Ma,
  • Kai Leong Chong,
  • Bofu Wang,
  • Jianhua Zhang,
  • Quan Zhou

摘要

In an extreme ultraviolet (EUV) vessel, intense heating occurs when a high-power laser irradiates tin droplets, generating extreme thermal pressure gradients that drive complex flow dynamics. This review focuses on two critical aspects governing flow properties and debris transport within the vessel: main shock behavior and thermal expansion dynamics. Key considerations include finite-source shock dynamics, environmental effects on shock propagation, gas contact motion, and interface instabilities. The evolution of the main shock and gas contact is primarily determined by the initial pressure ratio and sound speed ratio between the heat source and ambient gas. Furthermore, Rayleigh-Taylor and Richtmyer-Meshkov instabilities dominate the evolution of gas-gas interfaces. This work presents a comprehensive analysis of the complex flow mechanisms underlying early-stage, high-temperature flow expansion in EUV source vessels.