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<p>We present a cleanroom-compatible fabrication route to open space microfluidic devices, utilizing a multilayer lamination/photolithography process on the wafer scale. The devices were applied to generate and maintain molecular surfactant films. In a dedicated setup, film stability was investigated in conjunction with 108&#xa0;kHz ultrasonic sound, and response to acoustic waves in the audible range was determined.</p>

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Free-standing open space microfluidic devices by dry resist lamination

  • 期刊论文

  • 出版模式：

    开放获取

  • 发表日期：

    2025年6月23日

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  • Rui Liu,
  • Esteban Pedrueza-Villalmanzo,
  • Farah Fatima,
  • Aldo Jesorka

摘要

We present a cleanroom-compatible fabrication route to open space microfluidic devices, utilizing a multilayer lamination/photolithography process on the wafer scale. The devices were applied to generate and maintain molecular surfactant films. In a dedicated setup, film stability was investigated in conjunction with 108 kHz ultrasonic sound, and response to acoustic waves in the audible range was determined.