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<p>Adhesive-free thermal bonding is a key technology for the fabrication of crystalline waveguide lasers. In this study, refractive index matching was employed to reduce the numerical aperture (NA), with Yb: YAG and Er: YAG laser crystals selected as the bonding materials. Based on gap closure theory, the surface morphology conditions required for successful gap closure between the two crystals were calculated, establishing the following processing specifications: root mean square (RMS) roughness &lt; 0.6&#xa0;nm, surface figure accuracy better than λ/20, and summit radius in the range of 0.14–0.18&#xa0;mm. A comprehensive grinding and polishing procedure was developed, incorporating real-time dynamic monitoring to promptly identify process deviations and ensure precision at each stage. Post-processing measurements using a Zygo three-dimensional optical profiler demonstrated that the Yb: YAG sample exhibited a surface figure (PV) of 26.11&#xa0;nm, an RMS roughness σ of 0.479&#xa0;nm, and a summit radius of 0.16&#xa0;mm, while the Er: YAG sample showed a PV of 20.87&#xa0;nm, an RMS roughness σ of 0.557&#xa0;nm, and a summit radius of 0.16&#xa0;mm. Both samples met the optical contact criteria. Hydrophilic surfaces were achieved through hydrochloric acid activation, and an optimized thermal treatment enhanced the bonding strength. After four bonding attempts, a large-core Yb: YAG crystalline waveguide was successfully fabricated, providing a critical technological foundation for the development of next-generation high-power laser devices.</p>

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Large-core Yb: YAG crystalline waveguide fabrication

  • 期刊论文

  • 发表日期：

    2026年4月22日

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  • Xing Hu

摘要

Adhesive-free thermal bonding is a key technology for the fabrication of crystalline waveguide lasers. In this study, refractive index matching was employed to reduce the numerical aperture (NA), with Yb: YAG and Er: YAG laser crystals selected as the bonding materials. Based on gap closure theory, the surface morphology conditions required for successful gap closure between the two crystals were calculated, establishing the following processing specifications: root mean square (RMS) roughness < 0.6 nm, surface figure accuracy better than λ/20, and summit radius in the range of 0.14–0.18 mm. A comprehensive grinding and polishing procedure was developed, incorporating real-time dynamic monitoring to promptly identify process deviations and ensure precision at each stage. Post-processing measurements using a Zygo three-dimensional optical profiler demonstrated that the Yb: YAG sample exhibited a surface figure (PV) of 26.11 nm, an RMS roughness σ of 0.479 nm, and a summit radius of 0.16 mm, while the Er: YAG sample showed a PV of 20.87 nm, an RMS roughness σ of 0.557 nm, and a summit radius of 0.16 mm. Both samples met the optical contact criteria. Hydrophilic surfaces were achieved through hydrochloric acid activation, and an optimized thermal treatment enhanced the bonding strength. After four bonding attempts, a large-core Yb: YAG crystalline waveguide was successfully fabricated, providing a critical technological foundation for the development of next-generation high-power laser devices.