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<p>Electro-optic (EO) modulators are crucial components to generate high-speed photonic signals in the modern photonic communication system. Here we study the performance of a hybrid EO modulator employing a Si slot waveguide and a BaTiO<sub>3</sub> layer, where the EO effect of BaTiO<sub>3</sub> is stronger than that of widely used LiNbO<InlineEquation ID="IEq5"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10043_2025_950_Article_IEq5.gif" Format="GIF" Height="10" Rendition="HTML" Resolution="72" Type="Linedraw" Width="8" /> </InlineMediaObject> <EquationSource Format="TEX">\(_3\)</EquationSource> <EquationSource Format="MATHML"><math> <mmultiscripts> <mrow /> <mn>3</mn> <mrow /> </mmultiscripts> </math></EquationSource> </InlineEquation>. We demonstrate that an appropriate design for the slot waveguide, the BaTiO<InlineEquation ID="IEq6"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10043_2025_950_Article_IEq6.gif" Format="GIF" Height="10" Rendition="HTML" Resolution="72" Type="Linedraw" Width="8" /> </InlineMediaObject> <EquationSource Format="TEX">\(_3\)</EquationSource> <EquationSource Format="MATHML"><math> <mmultiscripts> <mrow /> <mn>3</mn> <mrow /> </mmultiscripts> </math></EquationSource> </InlineEquation> layer, and doped Si connectors to metal contacts can achieve a low voltage-length product <InlineEquation ID="IEq7"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10043_2025_950_Article_IEq7.gif" Format="GIF" Height="16" Rendition="HTML" Resolution="72" Type="Linedraw" Width="34" /> </InlineMediaObject> <EquationSource Format="TEX">\(V_\pi L\)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <msub> <mi>V</mi> <mi>π</mi> </msub> <mi>L</mi> </mrow> </math></EquationSource> </InlineEquation> of 0.16 V cm, a wide modulation bandwidth of 50 GHz, and a small propagation loss of <InlineEquation ID="IEq8"> <InlineMediaObject> <ImageObject Color="BlackWhite" FileRef="10043_2025_950_Article_IEq8.gif" Format="GIF" Height="13" Rendition="HTML" Resolution="72" Type="Linedraw" Width="28" /> </InlineMediaObject> <EquationSource Format="TEX">\(&lt;1\)</EquationSource> <EquationSource Format="MATHML"><math> <mrow> <mo>&lt;</mo> <mn>1</mn> </mrow> </math></EquationSource> </InlineEquation> dB/cm simultaneously. These values indicate efficient use of the proposed modulator in the photonic communication system.</p>

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BaTiO3/Si-hybrid slot-waveguide electro-optic modulator

  • 期刊论文

  • 发表日期：

    2025年2月4日

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  • Thomas M. Mercier,
  • Isao Tomita,
  • Martin D. B. Charlton

摘要

Electro-optic (EO) modulators are crucial components to generate high-speed photonic signals in the modern photonic communication system. Here we study the performance of a hybrid EO modulator employing a Si slot waveguide and a BaTiO3 layer, where the EO effect of BaTiO3 is stronger than that of widely used LiNbO \(_3\) 3 . We demonstrate that an appropriate design for the slot waveguide, the BaTiO \(_3\) 3 layer, and doped Si connectors to metal contacts can achieve a low voltage-length product \(V_\pi L\) V π L of 0.16 V cm, a wide modulation bandwidth of 50 GHz, and a small propagation loss of \(<1\) < 1 dB/cm simultaneously. These values indicate efficient use of the proposed modulator in the photonic communication system.