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<p>A brief review of micro/nano fabrication procedures based on electroplating and anodic oxidation processes is accenting the overlap with traditional electrochemical surface finishing, and the role of electrochemical tools to control and monitor technological processes. Consideration is limited to fabrication of ordered structures and their fragments being of interest for research in physics, and also for corresponding devices. The review also addresses the progress in electrochemical fabrication of functional materials (superconducting, magnetic, optical) utilized in such devices, and nanotechnological applications of electrochemical intercalation. The review can be considered as a guide to bibliography on electrochemical micro/nano fabrication.</p>

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Electrochemical surface finishing in miniature—micro and nano electrochemical fabrication for physics and engineering

  • 期刊论文

  • 发表日期：

    2025年3月10日

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  • Galina A. Tsirlina

摘要

A brief review of micro/nano fabrication procedures based on electroplating and anodic oxidation processes is accenting the overlap with traditional electrochemical surface finishing, and the role of electrochemical tools to control and monitor technological processes. Consideration is limited to fabrication of ordered structures and their fragments being of interest for research in physics, and also for corresponding devices. The review also addresses the progress in electrochemical fabrication of functional materials (superconducting, magnetic, optical) utilized in such devices, and nanotechnological applications of electrochemical intercalation. The review can be considered as a guide to bibliography on electrochemical micro/nano fabrication.