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<p>Functionally graded (FG) piezoelectric materials are widely used in designing intelligent components for micro-/nanoelectromechanical systems (MEMS/NEMS). However, as the scale decreases, the size dependence of electromechanical coupling properties becomes an important problem in component design. This paper investigates the electromechanical coupling response of plate-type piezoelectric components commonly employed in MEMS/NEMS. Based on extended dielectric theory, Kirchhoff’s plate theory and von Karman’s geometric nonlinearity, a dynamic model of FG piezoelectric microplate with flexoelectric effect is constructed. The governing equations, boundary conditions and initial conditions are obtained by applying the Hamilton’s variational principle and subsequently discretized via differential quadrature method. The electromechanical coupling response of FG piezoelectric microplate is examined under periodic loading leading to large deflection deformation. The coupling response between piezoelectric effect and flexoelectric effect is analyzed. The influence of functionally gradient index on dimensionless deflection and induced potential is also discussed. This study provides insights beneficial for the design of common plate-type micro-actuators in MEMS/NEMS.</p>

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Electromechanical coupling responses of functionally graded piezoelectric microplates incorporating flexoelectric effect under large deflection deformation

  • 期刊论文

  • 发表日期：

    2025年9月1日

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  • Lichang Shan,
  • Guangchun Xiao,
  • Anqing Li,
  • Shasha Zhou,
  • Li Wang,
  • Weiguang Su,
  • Zhiqiang Shi

摘要

Functionally graded (FG) piezoelectric materials are widely used in designing intelligent components for micro-/nanoelectromechanical systems (MEMS/NEMS). However, as the scale decreases, the size dependence of electromechanical coupling properties becomes an important problem in component design. This paper investigates the electromechanical coupling response of plate-type piezoelectric components commonly employed in MEMS/NEMS. Based on extended dielectric theory, Kirchhoff’s plate theory and von Karman’s geometric nonlinearity, a dynamic model of FG piezoelectric microplate with flexoelectric effect is constructed. The governing equations, boundary conditions and initial conditions are obtained by applying the Hamilton’s variational principle and subsequently discretized via differential quadrature method. The electromechanical coupling response of FG piezoelectric microplate is examined under periodic loading leading to large deflection deformation. The coupling response between piezoelectric effect and flexoelectric effect is analyzed. The influence of functionally gradient index on dimensionless deflection and induced potential is also discussed. This study provides insights beneficial for the design of common plate-type micro-actuators in MEMS/NEMS.