Scholarlink

<p>In this work, a micro heater enabled gas sensor based on a nano crystalline WO₃ – TiO₂ composite is developed for the selective detection of nitrogen dioxide (NO₂) gas. A detailed comprehensive analysis of micro-heater materials was carried out to evaluate their thermal efficiency leading to the selection of tungsten (W) as an optimal material due to its stability and ability to generate high temperatures at low bias voltage. The micro heater plays a crucial role in establishing a uniform and controlled temperature profile, which significantly enhances gas adsorption and minimizes the effects of humidity. Prior to fabrication, the sensor is designed and analyzed using finite element method (FEM) based multiphysics simulations. The optimized micro heater configuration enabled the device to achieve an ideal operating temperature of approximately 453.15&#xa0;K under low-voltage conditions. The WO₃ (95%) – TiO₂ (5%) composite sensing layer was synthesized and characterized using scanning electron microscopy (SEM), Atomic Force Microscopy (AFM), and X-ray Diffraction (XRD) confirming its nanocrystalline structure. The presented sensor exhibits a high response of 82% toward NO₂ gas, demonstrating the effectiveness of combining an optimized micro-heater design with heterostructured sensing materials for enhanced gas sensing performance.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Development of a robust NO2 gas sensor utilizing a micro heater and nano crystalline TiO2 + WO3 composite for enhanced sensing performance

  • 期刊论文

  • 发表日期：

    2026年7月27日

查看全文
  • Britto Martin Paul Naricetti,
  • G. V. Ganesh,
  • Lakshmi Narayana Thalluri,
  • N. Bhushana Babu Daram,
  • Ch. V. Ravi Sankar,
  • K. Pandurangarao,
  • Koushik Guha

摘要

In this work, a micro heater enabled gas sensor based on a nano crystalline WO₃ – TiO₂ composite is developed for the selective detection of nitrogen dioxide (NO₂) gas. A detailed comprehensive analysis of micro-heater materials was carried out to evaluate their thermal efficiency leading to the selection of tungsten (W) as an optimal material due to its stability and ability to generate high temperatures at low bias voltage. The micro heater plays a crucial role in establishing a uniform and controlled temperature profile, which significantly enhances gas adsorption and minimizes the effects of humidity. Prior to fabrication, the sensor is designed and analyzed using finite element method (FEM) based multiphysics simulations. The optimized micro heater configuration enabled the device to achieve an ideal operating temperature of approximately 453.15 K under low-voltage conditions. The WO₃ (95%) – TiO₂ (5%) composite sensing layer was synthesized and characterized using scanning electron microscopy (SEM), Atomic Force Microscopy (AFM), and X-ray Diffraction (XRD) confirming its nanocrystalline structure. The presented sensor exhibits a high response of 82% toward NO₂ gas, demonstrating the effectiveness of combining an optimized micro-heater design with heterostructured sensing materials for enhanced gas sensing performance.