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<p>This study successfully fabricated and characterized an ultraviolet (UV) photodetector implemented with chevronic titanium dioxide (TiO<sub>2</sub>) thin film with gold (Au) nanoparticles (AuCTTF) deposited onto a p-type silicon substrate. The unique nanostructure was achieved using the oblique angle deposition (OAD) technique within an electron beam physical vapor deposition system. The device performances were compared with that of chevronic titanium dioxide (TiO<sub>2</sub>) thin film (CTTF). Material characterization confirmed the AuCTTF's distinct properties. Field emission scanning electron microscopy (FE-SEM) exhibited the successful growth of a porous chevronic nanostructure of approximately 273&#xa0;nm thickness. Raman spectra analysis indicated anatase peaks for the CTTF and a combination of anatase and rutile peaks for the AuCTTF. Optically, both the AuCTTF and CTTF exhibited the photoluminescence peaks at 376&#xa0;nm and 372&#xa0;nm respectively, indicating the band-to-band transition. The photodetectors’ performances were evaluated under ~ 390&#xa0;nm UV illumination at 3&#xa0;V bias. The AuCTTF-based device demonstrated superior performances across all key metrics. It achieved a higher photosensitivity (~ 1.34), responsivity (~ 6.79 A/W), detectivity (~ 7.04 × 10<sup>11</sup> Jonnes), and external quantum efficiency (2.16), alongside a lower noise equivalent power (~ 2.46 × 10<sup>–12</sup> W). These results conclusively establish that the surface plasmonic resonance as well as increase in the trapping of light in the AuCTTF engineered via OAD significantly enhances the performance of the AuCTTF-based UV photodetectors.</p>

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Au nanoparticle-induced plasmonic enhancement in a chevronic TiO2 UV photodetector for optical sensing applications

  • 期刊论文

  • 发表日期：

    2026年7月7日

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  • Pinky Khundrakpam,
  • Ashish Ranjan,
  • Biraj Shougaijam,
  • Hieu P. T. Nguyen,
  • Trupti Ranjan Lenka

摘要

This study successfully fabricated and characterized an ultraviolet (UV) photodetector implemented with chevronic titanium dioxide (TiO2) thin film with gold (Au) nanoparticles (AuCTTF) deposited onto a p-type silicon substrate. The unique nanostructure was achieved using the oblique angle deposition (OAD) technique within an electron beam physical vapor deposition system. The device performances were compared with that of chevronic titanium dioxide (TiO2) thin film (CTTF). Material characterization confirmed the AuCTTF's distinct properties. Field emission scanning electron microscopy (FE-SEM) exhibited the successful growth of a porous chevronic nanostructure of approximately 273 nm thickness. Raman spectra analysis indicated anatase peaks for the CTTF and a combination of anatase and rutile peaks for the AuCTTF. Optically, both the AuCTTF and CTTF exhibited the photoluminescence peaks at 376 nm and 372 nm respectively, indicating the band-to-band transition. The photodetectors’ performances were evaluated under ~ 390 nm UV illumination at 3 V bias. The AuCTTF-based device demonstrated superior performances across all key metrics. It achieved a higher photosensitivity (~ 1.34), responsivity (~ 6.79 A/W), detectivity (~ 7.04 × 1011 Jonnes), and external quantum efficiency (2.16), alongside a lower noise equivalent power (~ 2.46 × 10–12 W). These results conclusively establish that the surface plasmonic resonance as well as increase in the trapping of light in the AuCTTF engineered via OAD significantly enhances the performance of the AuCTTF-based UV photodetectors.