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<p>This study presents, Microelectromechanical Systems (MEMS)-based energy harvesters (EH) have played an increasingly significant role in automobiles and wireless sensor networks. Natural vibrational energy is the primary source for harvesting electricity, with the help of piezoelectric materials. The harvested energy can be utilized in automobiles and wireless sensor networks, reducing system complexity compared to bulky solar panels. A highly efficient MEMS energy harvester is essential for wireless sensor network systems to effectively acquire sensor data. MEMS-EH systems meet specific requirements such as power generation, eigenfrequency, and the use of piezoelectric materials. In this article, reviewed various MEMS-EH systems developed over the past two decades. The review focuses on design structures, piezoelectric materials, power generation, application areas, and operating frequencies. Finally, proposed future enhancements for MEMS-EH systems to address the challenges faced by existing harvesters.</p>

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Design, fabrication, characterization and production challenges of MEMS energy harvesters: a review

  • 期刊论文

  • 发表日期：

    2026年5月13日

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  • Taj Mohammad,
  • V. N. Koteswara Rao Devana,
  • V. Ravi Sankar Ch. ,
  • Vishnu Vardhana Reddy Karna,
  • P. Vijaya Kumar,
  • Praveen Kumar Seepana

摘要

This study presents, Microelectromechanical Systems (MEMS)-based energy harvesters (EH) have played an increasingly significant role in automobiles and wireless sensor networks. Natural vibrational energy is the primary source for harvesting electricity, with the help of piezoelectric materials. The harvested energy can be utilized in automobiles and wireless sensor networks, reducing system complexity compared to bulky solar panels. A highly efficient MEMS energy harvester is essential for wireless sensor network systems to effectively acquire sensor data. MEMS-EH systems meet specific requirements such as power generation, eigenfrequency, and the use of piezoelectric materials. In this article, reviewed various MEMS-EH systems developed over the past two decades. The review focuses on design structures, piezoelectric materials, power generation, application areas, and operating frequencies. Finally, proposed future enhancements for MEMS-EH systems to address the challenges faced by existing harvesters.