Finite element analysis of a microfluidic MEMS sensor for magnetophoretic blood flow control
摘要
The integration of MEMS resonators with microfluidic channels holds great promise for enhancing sensitivity in biomedical sensing applications. However, achieving precise control and accurate prediction of device behavior in magnetically responsive biological fluids remains a significant challenge. This study addresses this limitation through finite element simulations conducted in COMSOL Multiphysics to investigate resonance characteristics and particle dynamics in a MEMS-based microfluidic system under varying magnetic field strengths and iron oxide nanoparticle concentrations. Eigen frequency analysis revealed distinct vibrational modes, including flexural modes with resonance frequencies ranging from 2.0283 kHz to 17.659 kHz, and a torsional mode at 16.536 kHz with higher quality factors observed across all modes. Increasing the iron oxide concentration from 50 ppm to 300 ppm led to a substantial decrease in resonance frequency (from approximately 24 kHz to 12 kHz) due to mass-loading effects, while the quality factor rose significantly, surpassing 27,100, driven by enhanced magnetic interactions and reduced energy dissipation. Additionally, simulations under magnetic flux densities from 1 T to 4 T showed that increasing field strength altered both the magnetic scalar potential distribution and the device’s resonance response. Particle tracing confirmed strong magnetophoretic behavior of iron oxide particles, which aligned effectively with magnetic field gradients, unlike nonmagnetic blood particles. These findings provide critical insights for optimizing the design and performance of MEMS-based magnetic microfluidic sensors in biomedical applications.