<p>The demand for smart devices is increasing exponentially in the period of high technology. The ability of smart structures in terms of self-monitoring and the response to various types of inputs makes it as the most vital in many applications. In general, these structures are built with various types of sensors to measure different parameters and the Internet of Things to improve the performance and the monitoring capability. The most important parameters like lightweight, compact and advanced energy harvesting capabilities makes it the most crucial component in the field of human temperature measurement. The proposed system uses Nitinol, a shape memory alloy (SMA), and piezoelectric materials such as PVDF, ZnO, and PZT-5&#xa0;H. Mechanical stress on piezoelectric materials will produce electric output. Shape memory alloy is known for their ability to deform and return to their original initial state at the desired temperature. The work of powering, improving the life time and boosting its functionalities of the MEMS devices are the benefits of energy harvesting technology. The thermal energy generated by the human body is utilized for the usage of this smart structure. So, the need of additional batteries or cable power sources can be reduced. The proposed system uses the properties of SMA and piezo electric materials for efficient energy harvesting and power generation. The applications involving self-monitoring and self-powered systems in aerospace, civil, health care, automotive and bio-engineering can utilize the proposed method of integrating SMA and Piezoelectric materials.</p>