Design, fabrication, and testing of a detonation plasma switch based on micro-electro-mechanical systems
摘要
Exploding Foil Initiator Systems (EFIs) are widely employed in modern weaponry and nuclear applications due to their high safety and reliability. The high-voltage switch, a critical component of the pulse power module within the EFIs, plays a pivotal role in ensuring the reliable operation of the entire initiation system. In this study, a Detonating Plasma Switch (DPS) triggered by copper foil was designed and fabricated using Micro-Electro-Mechanical System (MEMS) technology, with a compact volume of approximately 18 mm³. Subsequently, the DPS was encapsulated using Land Grid Array (LGA) packaging technology, resulting in a total packaged volume of about 73.5 mm³. Multi-physics simulations, including static electric field analysis, electro-explosion phenomena, and current density distribution, were conducted using COMSOL Multiphysics software to validate the design parameters. Finally, the performance of the DPS was tested and the detonation performance was tested by selecting EFIs without blunt explosives. The results demonstrated that, upon closure, the DPS achieved a peak current of 1980 A under a trigger voltage of 700 V/0.22 µF, with a rise time not exceeding 250 ns and a delay time below 250 ns, which allows for the smooth detonation of exploding foil initiators that do not contain tonic sensing explosives. These findings provide technical support for the design of pulse power modules in EFIs.