Scholarlink

<p>This work presents the development, fabrication, and characterization of a piezoresistive MEMS (microelectromechanical systems) pressure sensor designed for compatibility with liquid propellants, offering enhanced sensitivity and reduced error through a software-based compensation technique. This approach enables the easy fabrication of piezoresistive MEMS pressure sensors, significantly reducing development cost, time, and labor without compromising performance characteristics. We demonstrate the design, fabrication, packaging, and characterization of a pressure sensor operating in the 0–6&#xa0;bar range, exhibiting excellent sensitivity, linearity, and low hysteresis. The MEMS sensor exhibits a sensitivity of 1.573&#xa0;mV/V/bar, with a stability of 0.1% Full-Scale Output (FSO), repeatability of 0.103% FSO, and combined nonlinearity and hysteresis of 0.35% FSO. This work employs software-based compensation, as opposed to conventional hardware methods, to reduce sensor errors. The software algorithm estimates real-time pressure more accurately across varying operating conditions by mitigating the effects of nonlinearity, hysteresis, and temperature variations. This enhanced measurement approach reduces the overall error in the uncompensated sensor output from 1.48% FSO to 0.15% FSO.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Stainless steel diaphragm-based piezoresistive pressure sensor

  • 期刊论文

  • 发表日期：

    2025年10月22日

查看全文
  • Linet Thomas Chiranackal,
  • Jitthu Joseph,
  • Pavithra Belthangady,
  • Kiran Kumar,
  • Vijay Kumar,
  • Jaspreet Singh,
  • M. M. Nayak

摘要

This work presents the development, fabrication, and characterization of a piezoresistive MEMS (microelectromechanical systems) pressure sensor designed for compatibility with liquid propellants, offering enhanced sensitivity and reduced error through a software-based compensation technique. This approach enables the easy fabrication of piezoresistive MEMS pressure sensors, significantly reducing development cost, time, and labor without compromising performance characteristics. We demonstrate the design, fabrication, packaging, and characterization of a pressure sensor operating in the 0–6 bar range, exhibiting excellent sensitivity, linearity, and low hysteresis. The MEMS sensor exhibits a sensitivity of 1.573 mV/V/bar, with a stability of 0.1% Full-Scale Output (FSO), repeatability of 0.103% FSO, and combined nonlinearity and hysteresis of 0.35% FSO. This work employs software-based compensation, as opposed to conventional hardware methods, to reduce sensor errors. The software algorithm estimates real-time pressure more accurately across varying operating conditions by mitigating the effects of nonlinearity, hysteresis, and temperature variations. This enhanced measurement approach reduces the overall error in the uncompensated sensor output from 1.48% FSO to 0.15% FSO.