<p>Microcantilever sensors offer exceptional sensitivity and compactness for biochemical detection, yet immersion in liquid environments often diminishes their resonant frequency and quality factor while demanding larger sample volumes. To address these challenges, we adopted the Suspended Microchannel Resonator (SMR) architecture, originally developed by Scott Manalis and colleagues at MIT, by integrating a microfluidic channel directly within the cantilever. This design permits the beam to oscillate in air as the analyte flows internally. We performed finite element analyses across various geometries and temperatures to establish performance benchmarks for this configuration. Our simulations reveal that, compared to fully immersed devices, the embedded-channel design substantially enhances both resonant frequency and Q-factor: increasing beam thickness nearly doubles Q, whereas lengthening the beam produces the expected Q reduction. Additionally, the embedded-channel cantilever exhibits markedly lower fluid damping and minimal sample consumption. These insights will inform microfabrication strategies and experimental validations, advancing the development of scalable, high-performance microcantilever biosensors.</p>

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Temperature-coupled analysis of vibration characteristics and Q-factor optimization of microchannel-integrated microcantilever beams

  • Jingjing Wang,
  • Yuehua Han,
  • Xi Wei,
  • Shuo Wang

摘要

Microcantilever sensors offer exceptional sensitivity and compactness for biochemical detection, yet immersion in liquid environments often diminishes their resonant frequency and quality factor while demanding larger sample volumes. To address these challenges, we adopted the Suspended Microchannel Resonator (SMR) architecture, originally developed by Scott Manalis and colleagues at MIT, by integrating a microfluidic channel directly within the cantilever. This design permits the beam to oscillate in air as the analyte flows internally. We performed finite element analyses across various geometries and temperatures to establish performance benchmarks for this configuration. Our simulations reveal that, compared to fully immersed devices, the embedded-channel design substantially enhances both resonant frequency and Q-factor: increasing beam thickness nearly doubles Q, whereas lengthening the beam produces the expected Q reduction. Additionally, the embedded-channel cantilever exhibits markedly lower fluid damping and minimal sample consumption. These insights will inform microfabrication strategies and experimental validations, advancing the development of scalable, high-performance microcantilever biosensors.