<p>One of the challenges in MEMS accelerometer design is optimization of structural dimensions within overall dimensional constraints. Sensor designs generally attempt to realize maximal sensitivity with minimal impact on other sensor characteristics, such as, precision, cross-axis sensitivity and bandwidth. Typical approaches use iterative refinements to structural parameters with attendant experimental fabrication steps to realize a functional device. Iterative design, fabrication and test process leads to long cycle-time with no assurance of convergence. This paper uses a theoretical framework based on structural characteristics along with technology and fabrication constraints to determine optimized dimensional parameters for the accelerometer design. Design of a z-axis accelerometer is used as a basis to develop the theoretical framework. This approach eliminates iterative design-fabrication steps and establishes design guidelines for the selected structure.</p>