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<p>RF MEMS shunt switches are gaining significant attention in high-frequency applications such as radar and satellite communication due to their low power consumption, excellent isolation, and miniaturization potential. However, achieving low actuation voltage while maintaining mechanical stability and high RF performance remains a critical design challenge, particularly in the K-band frequency range. This study aims to analyze and compare three different RF MEMS shunt switch configurations–a planar beam, a crab-leg meander beam, and a U-shaped meander beam–to identify the most suitable design for efficient K-band operation. Each switch configuration was evaluated using a combination of analytical modeling, finite element method (FEM) simulations via COMSOL Multiphysics for mechanical performance, and full-wave electromagnetic simulation using ANSYS HFSS. Key performance metrics such as pull-in voltage, return loss and structural stress were assessed and insertion loss of 0.004 dB at 22 GHZ is evaluated. Among the three configurations, the U-shaped meander beam (Design 3) demonstrated superior performance, achieving a notably low pull-in voltage of 5.3&#xa0;V and enhanced RF characteristics, including improved return loss and reduced insertion loss across the 18–26&#xa0;GHz frequency band. Mechanical analysis confirmed stress levels well below the yield limit, ensuring structural integrity and reliability. The integrated analysis confirms that the U-shaped meander beam design offers the most balanced and optimized performance, making it a strong candidate for K-band RF MEMS applications requiring low-voltage actuation, fast switching, and high-frequency stability.</p>

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Design, simulation and Analysis of Meander based Crab leg RF MEMS shunt switch for K-band Applications

  • 期刊论文

  • 发表日期：

    2025年7月16日

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  • Y. Anusha,
  • Koushik Guha,
  • Kavicharan Mummaneni

摘要

RF MEMS shunt switches are gaining significant attention in high-frequency applications such as radar and satellite communication due to their low power consumption, excellent isolation, and miniaturization potential. However, achieving low actuation voltage while maintaining mechanical stability and high RF performance remains a critical design challenge, particularly in the K-band frequency range. This study aims to analyze and compare three different RF MEMS shunt switch configurations–a planar beam, a crab-leg meander beam, and a U-shaped meander beam–to identify the most suitable design for efficient K-band operation. Each switch configuration was evaluated using a combination of analytical modeling, finite element method (FEM) simulations via COMSOL Multiphysics for mechanical performance, and full-wave electromagnetic simulation using ANSYS HFSS. Key performance metrics such as pull-in voltage, return loss and structural stress were assessed and insertion loss of 0.004 dB at 22 GHZ is evaluated. Among the three configurations, the U-shaped meander beam (Design 3) demonstrated superior performance, achieving a notably low pull-in voltage of 5.3 V and enhanced RF characteristics, including improved return loss and reduced insertion loss across the 18–26 GHz frequency band. Mechanical analysis confirmed stress levels well below the yield limit, ensuring structural integrity and reliability. The integrated analysis confirms that the U-shaped meander beam design offers the most balanced and optimized performance, making it a strong candidate for K-band RF MEMS applications requiring low-voltage actuation, fast switching, and high-frequency stability.