Enhancing output pressure of capacitive micromachined ultrasonic transducers (CMUTs): a comparative FEM study of different pressure-boosting methods
摘要
CMUTs show several merits compared to traditional piezoelectric transducers such as their wide bandwidth and integration with electronics. However, one of the main limitations of CMUTs is the relatively small output pressure compared to piezoelectric transducers, which may limit the capabilities of some applications that need high surface output pressure, such as High-Intensity Focused Ultrasound (HIFU). Various methods have been proposed to overcome the relatively small transmitting sensitivity of CMUTs and improve the output pressure. However, it should be noted that these methods may introduce additional steps to the fabrication process of CMUTs, potentially making the process more challenging. Using finite element modeling, this study compares some of these pressure-boosting methods in order to show which of these methods is more effective in improving the output pressure. Optimizing CMUT dimensions in terms of membrane radius, membrane thickness, and gap height results in higher output pressure compared to non-optimized dimensions, even when both designs have the same resonance frequency. In addition, applying biased square waves instead of biased sine waves, using dielectrics with a higher dielectric constant, patterning a trench into the membrane, or adding a center mass on top of the membrane enhances the transmitting sensitivity after the optimization of dimensions. Finally, a new method is also proposed to generate high surface pressure based on the results obtained from some of the reported methods.