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<p>In this work, we present the design, micro-fabrication and characterization of solenoid inductors with a large gap of up to 200 µm between the top and bottom conductors. The main micro-fabrication steps using microelectronics techniques are detailed. The interest of having a large gap is to insert a magnetic material in the future to increase the inductance value and limit leakage flux. Measurements on the components produced are presented in Sect. <InternalRef RefID="Sec10">4</InternalRef>, then compared with measurement and simulation results. To demonstrate the feasibility of such components, we have reduced the number of turns to 5. In the conclusion, the example of an inductor with a ferrite magnetic core is presented. </p>

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Design, micro-fabrication and characterization of solenoid inductors with thick core region

  • 期刊论文

  • 发表日期：

    2025年5月21日

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  • M. Podda Abouna,
  • A. Deubaibe,
  • J. P. Chatelon,
  • S. Capraro,
  • D. Piétroy,
  • A. Piot,
  • D. Yaya,
  • J. J. Rousseau

摘要

In this work, we present the design, micro-fabrication and characterization of solenoid inductors with a large gap of up to 200 µm between the top and bottom conductors. The main micro-fabrication steps using microelectronics techniques are detailed. The interest of having a large gap is to insert a magnetic material in the future to increase the inductance value and limit leakage flux. Measurements on the components produced are presented in Sect. 4, then compared with measurement and simulation results. To demonstrate the feasibility of such components, we have reduced the number of turns to 5. In the conclusion, the example of an inductor with a ferrite magnetic core is presented.