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<p>This study investigates the symmetry breaking in MEMS arches due to a skewed electrostatic field. Three electrode arrangements were considered 100%, 25%, and 40% of the beam’s length. To simulate the system’s behavior, a nonlinear model was developed considering the geometric and forcing nonlinearities. The equation of motion was solved using five modes in Galerkin’s expansion. The findings demonstrated that the deflection, profile, and variation of the modal coordinates all depend on the force. It can be deduced that when a symmetrical field is present, the beam will maintain a symmetrical configuration. However, this is not true for skewed electrodes.</p>

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Symmetry breaking in an initially arch micro-resonator excited by a skewed electrostatic field

  • 期刊论文

  • 发表日期：

    2025年6月4日

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  • Ayman M. Alneamy

摘要

This study investigates the symmetry breaking in MEMS arches due to a skewed electrostatic field. Three electrode arrangements were considered 100%, 25%, and 40% of the beam’s length. To simulate the system’s behavior, a nonlinear model was developed considering the geometric and forcing nonlinearities. The equation of motion was solved using five modes in Galerkin’s expansion. The findings demonstrated that the deflection, profile, and variation of the modal coordinates all depend on the force. It can be deduced that when a symmetrical field is present, the beam will maintain a symmetrical configuration. However, this is not true for skewed electrodes.