Design of position controller for dicing saw chuck table based on improved LADRC technology

As a critical piece of equipment in chip packaging, the cutting accuracy of a dicing saw directly impacts the yield in chip production. The chuck table, a key component of the dicing saw, plays a crucial role in determining the final cutting precision, as its control accuracy directly influences the saw’s overall performance. This paper proposes a cascaded reduced-order linear active disturbance rejection controller, specifically designed for the position control characteristics of the chuck table in dicing saws. The reduced-order linear active disturbance rejection controller compensates for uncertain disturbances in the system through estimation, without the need to feed back estimated position-velocity information. To further enhance the performance of this controller, a second reduced-order observer is introduced, creating a cascaded configuration that strengthens the disturbance rejection capability of the control algorithm. The cascaded structure improves both robustness and accuracy, making it well-suited for the high precision required in dicing saw operations. To address the parameter tuning challenge of the proposed cascaded reduced-order linear active disturbance rejection controller, the golden jackal optimization algorithm is employed to adjust and optimize the internal parameters of the control strategy. This method ensures an optimal balance between performance and robustness. Finally, the superior performance of the proposed controller in the position control of the dicing saw’s chuck table is demonstrated by comparing it with the conventional linear active disturbance rejection controller, the PI controller, and the reduced-order linear active disturbance rejection controller. The comparisons are made in terms of control accuracy and robustness to disturbances, highlighting the advantages of the cascaded control design in achieving higher precision and improved immunity to interference.