Topology optimization research and simulation analysis of high-performance MEMS pressure sensor
摘要
The stress and deflection differences between the conventional membrane and the quatrefoil membrane were analyzed by the finite element method. Due to the excellent performance of the quatrefoil membrane structure, it was selected as the initial structure for topology optimization. To make the sensor achieve the expected performance, structural optimization with multi-objective functions was investigated under various constraints. When the improved structure is compared to the traditional structure, the results show higher sensitivity and lower nonlinearity of the new sensor. The novel sensor described in this paper has a theoretical sensitivity of 5.202 (mV/V)/kPa and a low nonlinearity of − 0.26% full-scale (FS) in the pressure range of 0–8 kPa. Furthermore, the main distribution areas of the residual stress of the sensor under thermal expansion were analyzed.