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<p>Spherical optical elements are an important classification of modern optical system components. Surface defects on optical elements can cause serious problems to the optical system. Fast and accurate defect detection for large aperture (200&#xa0;mm) spherical optical elements is a challenge for industrial applications due to the tiny scale of the defects and the non-flat and super-smooth surface. A surface defect detection instrument for large aperture spherical optical elements is established in this paper, while the main contributions are: (1) A 5-axis motion system with microscopic imaging and multi-angle lighting system is designed for defect detection. (2) To image the spherical element surface clearly and completely, an adaptive path planning method that suits the 5-axis motion system is raised. (3) Aiming at tiny and weak defects of precise optical elements, an effective defect detection algorithm based on reverse attention is proposed for the instrument, which outperforms the baseline methods. Experiments display the instrument’s superior capability to existing instruments that, for a spherical optical element of 200&#xa0;mm aperture and 200&#xa0;mm radius of the sphere surface, the instrument can achieve surface defect detection with the precision of 2&#xa0;μm in less than 10&#xa0;min.</p>

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A surface defect detection instrument for large aperture spherical optical elements

  • 期刊论文

  • 发表日期：

    2025年1月5日

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  • Mingwei Li,
  • Yali Shi,
  • Zhengtao Zhang,
  • Xian Tao,
  • Xiuqin Shang

摘要

Spherical optical elements are an important classification of modern optical system components. Surface defects on optical elements can cause serious problems to the optical system. Fast and accurate defect detection for large aperture (200 mm) spherical optical elements is a challenge for industrial applications due to the tiny scale of the defects and the non-flat and super-smooth surface. A surface defect detection instrument for large aperture spherical optical elements is established in this paper, while the main contributions are: (1) A 5-axis motion system with microscopic imaging and multi-angle lighting system is designed for defect detection. (2) To image the spherical element surface clearly and completely, an adaptive path planning method that suits the 5-axis motion system is raised. (3) Aiming at tiny and weak defects of precise optical elements, an effective defect detection algorithm based on reverse attention is proposed for the instrument, which outperforms the baseline methods. Experiments display the instrument’s superior capability to existing instruments that, for a spherical optical element of 200 mm aperture and 200 mm radius of the sphere surface, the instrument can achieve surface defect detection with the precision of 2 μm in less than 10 min.