<p>This work presents a practical finite element modeling strategy, the Crack Element Method (CEM), for simulating the dynamic crack propagation in two-dimensional structures. The method employs an element-splitting algorithm based on the Edge-based Smoothed Finite Element Method (ES-FEM) to capture the element-wise crack growth while reducing the formation of poorly shaped elements that can compromise numerical accuracy and computational performance. A fracture energy release rate formulation is also developed based on the evolving topology of the split elements. The proposed approach is validated through a series of classical benchmark problems, demonstrating its accuracy and robustness in addressing dynamic fracture scenarios. Finally, the applicability of the CEM is illustrated in a case study involving a proof-of-concept patterned Cu/Ultra Low-k interconnect structure.</p>

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A practical finite element approach for simulating dynamic crack growth in a proof-of-concept interconnect structure

  • Yuxi Xie,
  • Ethan J. Wu,
  • Xu Lu,
  • Jimmy Perez,
  • Shaofan Li

摘要

This work presents a practical finite element modeling strategy, the Crack Element Method (CEM), for simulating the dynamic crack propagation in two-dimensional structures. The method employs an element-splitting algorithm based on the Edge-based Smoothed Finite Element Method (ES-FEM) to capture the element-wise crack growth while reducing the formation of poorly shaped elements that can compromise numerical accuracy and computational performance. A fracture energy release rate formulation is also developed based on the evolving topology of the split elements. The proposed approach is validated through a series of classical benchmark problems, demonstrating its accuracy and robustness in addressing dynamic fracture scenarios. Finally, the applicability of the CEM is illustrated in a case study involving a proof-of-concept patterned Cu/Ultra Low-k interconnect structure.