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<p>In this study, the spatial coherence of the 46.9&#xa0;nm capillary discharge extreme ultraviolet (EUV) laser was analyzed. The fringe visibility of the laser was measured using Young’s double-slit method at different transverse positions of the laser spot and showed the same trend as the laser intensity spatial distribution. Additionally, the fringe visibilities corresponding to different Ar pressures were measured and were found to increase with the laser intensities. The results also showed that the relative intensity and maximum fringe visibility of the laser were linearly reduced with a decrease in capillary length from 35&#xa0;cm to 25&#xa0;cm. The highest fringe visibility value reached 0.935 under the conditions of a 35&#xa0;cm capillary length and an internal Ar pressure of 20&#xa0;Pa. These findings contribute to the expansion of applications for the 46.9&#xa0;nm lasers.</p>

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Investigating the transverse spatial coherence of 46.9 nm laser pumped by capillary discharge

  • 期刊论文

  • 发表日期：

    2025年11月20日

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  • Dongdi Zhao,
  • Jingjun Li,
  • Muhammad Usman Khan,
  • Huaiyu Cui,
  • Bo An,
  • Zhigang Fan,
  • Yongpeng Zhao

摘要

In this study, the spatial coherence of the 46.9 nm capillary discharge extreme ultraviolet (EUV) laser was analyzed. The fringe visibility of the laser was measured using Young’s double-slit method at different transverse positions of the laser spot and showed the same trend as the laser intensity spatial distribution. Additionally, the fringe visibilities corresponding to different Ar pressures were measured and were found to increase with the laser intensities. The results also showed that the relative intensity and maximum fringe visibility of the laser were linearly reduced with a decrease in capillary length from 35 cm to 25 cm. The highest fringe visibility value reached 0.935 under the conditions of a 35 cm capillary length and an internal Ar pressure of 20 Pa. These findings contribute to the expansion of applications for the 46.9 nm lasers.