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<p>Here, we introduce an optical interferometric microfiber sensor for in situ measurement of flow velocity in a microfluidic chip. The interferometric sensor is fabricated by fusing and tapering a standard single-mode optical fiber, and then embedded into a microfluidic chip, where the sensor element intersects vertically with the liquid flow channel. As the liquid flows through the channel, it applies pressure to the sensor’s sensitive surface, causing a wavelength shift in the transmission spectrum proportional to the flow velocity. Real-time monitoring and analysis of this wavelength shift enable precise flow velocity measurement. Results show that the proposed sensor chip exhibits excellent measurement performance within a average flow velocity range of 0–30.391&#xa0;cm/s, with a average sensitivity of 0.094&#xa0;nm/(cm/s). The resolution of average flow velocity measurement can reach 1.2&#xa0;cm/s and the accuracy exceeds 90%.</p>

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Optical interferometric microfiber sensor for in situ flow velocity measurement in microfluidic chips

  • 期刊论文

  • 发表日期：

    2025年8月6日

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  • Fei Xie,
  • Lili Liang,
  • Chenyu Zhao,
  • Rui Wang,
  • Kang Yang,
  • Sumei Jia,
  • Guoyu Li,
  • Yan Li

摘要

Here, we introduce an optical interferometric microfiber sensor for in situ measurement of flow velocity in a microfluidic chip. The interferometric sensor is fabricated by fusing and tapering a standard single-mode optical fiber, and then embedded into a microfluidic chip, where the sensor element intersects vertically with the liquid flow channel. As the liquid flows through the channel, it applies pressure to the sensor’s sensitive surface, causing a wavelength shift in the transmission spectrum proportional to the flow velocity. Real-time monitoring and analysis of this wavelength shift enable precise flow velocity measurement. Results show that the proposed sensor chip exhibits excellent measurement performance within a average flow velocity range of 0–30.391 cm/s, with a average sensitivity of 0.094 nm/(cm/s). The resolution of average flow velocity measurement can reach 1.2 cm/s and the accuracy exceeds 90%.