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<p>To address the shortcomings of single-color switching and insufficient comprehensive performance of pure WO<sub>3</sub> electrochromic films, the Cu/WO<sub>x</sub> composite films were prepared in this study via dual-target magnetron co-sputtering by adjusting the sputtering power of the Cu target. The copper doping content in the films was precisely regulated by adjusting the sputtering power of the Cu target, and a series of Cu/WO<sub>x</sub> films with different process parameters were fabricated. Ultraviolet-visible spectrophotometer and electrochemical workstation were employed to characterize and analyze the multicolor electrochromic effects and the corresponding electrochemical properties of the prepared films. Results show that Cu doping induces the formation of the CuWO<sub>4</sub> phase, which introduces new electrochemical reduction peaks and realizes multi-color regulation of the films. The WO<sub>x</sub>-3 sample (Cu sputtering power 3&#xa0;W) exhibits the optimal performance, showing yellow, grayish green and deep blue at 0.6&#xa0;V, -0.1&#xa0;V and -0.6&#xa0;V respectively, with excellent ion diffusion stability. This work provides a feasible approach for the preparation of high-performance multi-color WO<sub>3</sub>-based electrochromic films.</p>

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Multicolor Electrochromic Cu/WOx Composite Films Deposited by Dual-Target Magnetron Co-Sputtering

  • 期刊论文

  • 发表日期：

    2026年7月1日

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  • Shuran Liao,
  • Yinghui Tang,
  • Yonglian Zou,
  • Xiang Qi

摘要

To address the shortcomings of single-color switching and insufficient comprehensive performance of pure WO3 electrochromic films, the Cu/WOx composite films were prepared in this study via dual-target magnetron co-sputtering by adjusting the sputtering power of the Cu target. The copper doping content in the films was precisely regulated by adjusting the sputtering power of the Cu target, and a series of Cu/WOx films with different process parameters were fabricated. Ultraviolet-visible spectrophotometer and electrochemical workstation were employed to characterize and analyze the multicolor electrochromic effects and the corresponding electrochemical properties of the prepared films. Results show that Cu doping induces the formation of the CuWO4 phase, which introduces new electrochemical reduction peaks and realizes multi-color regulation of the films. The WOx-3 sample (Cu sputtering power 3 W) exhibits the optimal performance, showing yellow, grayish green and deep blue at 0.6 V, -0.1 V and -0.6 V respectively, with excellent ion diffusion stability. This work provides a feasible approach for the preparation of high-performance multi-color WO3-based electrochromic films.