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<p>Refractory metal doped Ni-based multilayers, were fabricated via magnetron sputtering and subsequently annealed at 1000&#xa0;°C to simulate harsh service conditions. The evolution of microstructural and mechanical properties was systematically investigated. The results show that the as-deposited multilayers possess fine microstructures with increased hardness from solid solution and grain refinement strengthening. After annealing, the 5 at% W doped film suffered severe softening due to complete layer dissolution and significant grain growth into a single-phase solid solution. In contrast, the 5 at% MoW doped film exhibited remarkable annealing-induced hardening, achieving average hardness of 11.5 GPa. This enhancement is attributed to precipitation strengthening from hard phases and effective inhibition of excessive grain coarsen. The 5 at% MoW co-doped multilayer demonstrates excellent mechanical stability at 1000&#xa0;°C, characterized by annealing-induced hardening and suppressed grain growth, offering a promising candidate for high-temperature MEMS structural components requiring both high strength and thermal reliability.</p>

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The microstructure and mechanical properties of refractory metal doped Ni-based multilayers before and after annealing at 1000 °C

  • 期刊论文

  • 发表日期：

    2026年3月26日

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  • Ran Sun,
  • Chao Zhang,
  • Yang Chen,
  • Baosen Zhang

摘要

Refractory metal doped Ni-based multilayers, were fabricated via magnetron sputtering and subsequently annealed at 1000 °C to simulate harsh service conditions. The evolution of microstructural and mechanical properties was systematically investigated. The results show that the as-deposited multilayers possess fine microstructures with increased hardness from solid solution and grain refinement strengthening. After annealing, the 5 at% W doped film suffered severe softening due to complete layer dissolution and significant grain growth into a single-phase solid solution. In contrast, the 5 at% MoW doped film exhibited remarkable annealing-induced hardening, achieving average hardness of 11.5 GPa. This enhancement is attributed to precipitation strengthening from hard phases and effective inhibition of excessive grain coarsen. The 5 at% MoW co-doped multilayer demonstrates excellent mechanical stability at 1000 °C, characterized by annealing-induced hardening and suppressed grain growth, offering a promising candidate for high-temperature MEMS structural components requiring both high strength and thermal reliability.