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<p>In this research, a specific type of pore-like nano-structured porous silicon (nano PS) morphologies was used as substrates to fabricate multi-layer nanostructure gas sensors. The nanostructures layers, include nano PS, tungsten oxide nanoparticles (WO<sub>3</sub>NPs), gold nanoparticles (AuNPs), and silver nanoparticles (AgNPs). The ion reduction process was carried out to synthesize these nanoparticles from their corresponding salt solutions via dangling bonds of nano PS. Two specific kinds of NO<sub>2</sub> gas sensors have been synthesized and tested under different gas concentrations, include (Al/WO<sub>3</sub>NPS/nano PS/Si/Al) hybrid nanostructures, and (Al/Ag, Au NPs/WO<sub>3</sub>NPS/nano PS/Si/Al) hybrid nanostructures. The sensing circuit utilizes a simple, easy-to-operate resonance RLC circuit in a parallel configuration. The obtained results of the gas sensors exposed to a significant improvement in sensitivity and detection limits after incorporating AuNPs, AgNPs, and WO<sub>3</sub>NPs, due to the higher value of specific surface area, and the active changes in the sensor’s total capacitance.</p>

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Multi nanostructures layer /nano porous silicon hybrid structures gas sensors

  • 期刊论文

  • 发表日期：

    2026年3月24日

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  • Mehdi Q. Zayer,
  • Layla A. Wali,
  • Alwan M. Alwan

摘要

In this research, a specific type of pore-like nano-structured porous silicon (nano PS) morphologies was used as substrates to fabricate multi-layer nanostructure gas sensors. The nanostructures layers, include nano PS, tungsten oxide nanoparticles (WO3NPs), gold nanoparticles (AuNPs), and silver nanoparticles (AgNPs). The ion reduction process was carried out to synthesize these nanoparticles from their corresponding salt solutions via dangling bonds of nano PS. Two specific kinds of NO2 gas sensors have been synthesized and tested under different gas concentrations, include (Al/WO3NPS/nano PS/Si/Al) hybrid nanostructures, and (Al/Ag, Au NPs/WO3NPS/nano PS/Si/Al) hybrid nanostructures. The sensing circuit utilizes a simple, easy-to-operate resonance RLC circuit in a parallel configuration. The obtained results of the gas sensors exposed to a significant improvement in sensitivity and detection limits after incorporating AuNPs, AgNPs, and WO3NPs, due to the higher value of specific surface area, and the active changes in the sensor’s total capacitance.