<p>Ag thin film devices have recently come into widespread use in vivo and on water surfaces. Improving the chemical stability of Ag thin film is important for use under those environments. This study investigated the effects of Sb and Bi doping on the crystallinity and chemical stability of Ag thin film. Undoped, Sb-doped, and Bi-doped Ag thin films were grown on quartz substrates or PET films at room temperature by radio frequency magnetron sputtering. Under these growth conditions, Sb and Bi doping suppressed randomness of crystalline orientation, decreased the grain size, and increased the grain boundary reflection coefficient and the amount of crystal defects. To evaluate chemical stability, Ag thin films grown on PET films were immersed in the pH 9.0 buffer solution and the concentrations of eluted Ag were determined. Sb and Bi doping worsened the chemical stability of Ag thin films due to the degraded crystallinity during short-term immersion. By contrast, the long-term chemical stability was enhanced by Sb and Bi doping due to the strengthened Ag/PET interface. Especially good chemical stability was observed for the Sb-doped Ag thin film grown on PET film. Eluted Sb and Bi concentrations were below the detection limit. A biocompatibility assay in vitro showed that these Ag thin films have low toxicity. These findings demonstrated that Sb and Bi doping enhance the chemical stability of Ag thin films grown at room temperature and that Sb- and Bi-doped Ag thin films are biocompatible and environmentally friendly materials.</p>