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<p>The graphoepitaxial seeding provides a possibility of fabrication of epitaxial thin films of anisotropic materials with unusual orientation. This technique allows preparation of YBa<sub>2</sub>Cu<sub>3</sub>O<sub>x</sub> (YBCO) thin films with <i>c</i> axis position close to the substrate plane - the high-tilt YBCO films - that may be applied for fabrication of scalable intrinsic Josephson structures. The structure of YBCO films deposited on 14–23º tilted-axes NdGaO<sub>3</sub> (NGO) substrates with pulsed laser deposition was studied with the X-ray diffraction techniques. Two orientations of YBCO grains, pseudo-<i>c</i> (001)<sub>YBCO</sub>||(110)<sub>NGO</sub> and pseudo-<i>a</i> (100)<sub>YBCO</sub>||(110)<sub>NGO</sub> (the high-tilt orientation), were observed. The dominant orientation of the film is set in the very beginning of deposition with overgrowth of the pseudo-<i>c</i> seeds with the pseudo-<i>a</i> grains or vice versa. The disorder in the top layer of the film rapidly increases with the volume part of pseudo-<i>a</i> grains, while the crystallinity and the mosaicity of the main layer are not affected by the film orientation. Symmetric (103) grain boundaries between the pseudo-<i>c</i> and pseudo-<i>a</i> grains dominate in the top layer. The pseudo-<i>c</i> grains experience a significant effect of the substrate-induced strain; the introduction of pseudo-<i>a</i> grains results in a relaxed structure. Secondary seeding of the pseudo-<i>c</i> grains is observed in thick films, grown with the vapor-liquid-solid mechanism. The lattice of such grains is completely strained by the bottom pseudo-<i>a</i> oriented layer.</p>

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Structure of high-tilt YBa2Cu3Ox thin films by pulsed laser deposition

  • 期刊论文

  • 发表日期：

    2026年1月8日

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  • Peter B. Mozhaev,
  • Jørn Bindslev Hansen,
  • Claus S. Jacobsen

摘要

The graphoepitaxial seeding provides a possibility of fabrication of epitaxial thin films of anisotropic materials with unusual orientation. This technique allows preparation of YBa2Cu3Ox (YBCO) thin films with c axis position close to the substrate plane - the high-tilt YBCO films - that may be applied for fabrication of scalable intrinsic Josephson structures. The structure of YBCO films deposited on 14–23º tilted-axes NdGaO3 (NGO) substrates with pulsed laser deposition was studied with the X-ray diffraction techniques. Two orientations of YBCO grains, pseudo-c (001)YBCO||(110)NGO and pseudo-a (100)YBCO||(110)NGO (the high-tilt orientation), were observed. The dominant orientation of the film is set in the very beginning of deposition with overgrowth of the pseudo-c seeds with the pseudo-a grains or vice versa. The disorder in the top layer of the film rapidly increases with the volume part of pseudo-a grains, while the crystallinity and the mosaicity of the main layer are not affected by the film orientation. Symmetric (103) grain boundaries between the pseudo-c and pseudo-a grains dominate in the top layer. The pseudo-c grains experience a significant effect of the substrate-induced strain; the introduction of pseudo-a grains results in a relaxed structure. Secondary seeding of the pseudo-c grains is observed in thick films, grown with the vapor-liquid-solid mechanism. The lattice of such grains is completely strained by the bottom pseudo-a oriented layer.