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<p>Ultrafast laser nanostructuring of semiconductor substrates can markedly improve the sensitivity of Surface-Enhanced Raman Spectroscopy (SERS). In this work, we investigated the SERS response of rhodamine 6G (R6G) on regular laser-induced periodic surface structures (LIPSS) fabricated on silicon using femtosecond laser pulses and subsequently decorated with silver nanoparticles produced by femtosecond laser ablation in ethanol. The resulting hybrid substrates enabled uniform analyte adsorption and efficient formation of plasmonic hotspots, allowing reliable detection of R6G down to 10⁻⁷ M. Compared to planar silicon, the nanostructured surfaces exhibited an approximately 25-fold higher enhancement factor, arising from stronger light backscattering by the periodic architecture and the tighter packing of Ag nanoparticles within the LIPSS valleys, which reduces interparticle spacing and increases electromagnetic coupling. FDTD simulations further revealed that the electric field intensifies dramatically when nanoparticle separations approach 2&#xa0;nm significantly stronger than at 10&#xa0;nm corroborating the experimentally observed enhancement.</p>

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Ultrafast laser nanostructured silicon coated with silver nanoparticles for efficient SERS detection of R6G

  • 期刊论文

  • 发表日期：

    2026年1月20日

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  • B. X. Eshchanov,
  • G. I. Mukhamedov,
  • N. S. Khalilova,
  • B. R. Sobirov,
  • M. Vapaev,
  • G. S. Boltaev

摘要

Ultrafast laser nanostructuring of semiconductor substrates can markedly improve the sensitivity of Surface-Enhanced Raman Spectroscopy (SERS). In this work, we investigated the SERS response of rhodamine 6G (R6G) on regular laser-induced periodic surface structures (LIPSS) fabricated on silicon using femtosecond laser pulses and subsequently decorated with silver nanoparticles produced by femtosecond laser ablation in ethanol. The resulting hybrid substrates enabled uniform analyte adsorption and efficient formation of plasmonic hotspots, allowing reliable detection of R6G down to 10⁻⁷ M. Compared to planar silicon, the nanostructured surfaces exhibited an approximately 25-fold higher enhancement factor, arising from stronger light backscattering by the periodic architecture and the tighter packing of Ag nanoparticles within the LIPSS valleys, which reduces interparticle spacing and increases electromagnetic coupling. FDTD simulations further revealed that the electric field intensifies dramatically when nanoparticle separations approach 2 nm significantly stronger than at 10 nm corroborating the experimentally observed enhancement.