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<p>A modular pulsed laser deposition (PLD) system was built and validated on the epitaxial growth of La<sub>0.5</sub>Sr<sub>0.5</sub>CoO<sub>3</sub> (LSCO) thin films. The LSCO growth was compared using both a second harmonic Nd: YAG (λ = 532&#xa0;nm) laser and a excimer KrF (λ = 248&#xa0;nm) laser. Epitaxial growth was confirmed in both cases. Crystallographic analysis confirmed epitaxial growth with in-plane tensile strain, consistent with the 1.7% lattice mismatch between LSCO and SrTiO<sub>3</sub> (STO) substrates. In-plane and out-of-plane lattice parameters were determined from asymmetric reciprocal space map (RSM). The in-plane parameter in both films was determined to be 3.91 Å, while the out-of-plane parameter was ca. 3.78 Å. The <sup>16</sup>O resonance Rutherford Backscattering (RBS) measurements validated the stoichiometric growth of the thin films. The films grown using the Nd: YAG and excimer lasers exhibited comparable thicknesses.</p>

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Epitaxial and stoichiometric La0.5Sr0.5CoO3 thin films with a mobile pulsed laser deposition system

  • 期刊论文

  • 出版模式：

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  • 发表日期：

    2025年8月5日

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  • Sharath Rameshbabu,
  • Daniele Pergolesi,
  • Arnold Müller,
  • Christof Vockenhuber,
  • Thomas Lippert,
  • Davide Bleiner

摘要

A modular pulsed laser deposition (PLD) system was built and validated on the epitaxial growth of La0.5Sr0.5CoO3 (LSCO) thin films. The LSCO growth was compared using both a second harmonic Nd: YAG (λ = 532 nm) laser and a excimer KrF (λ = 248 nm) laser. Epitaxial growth was confirmed in both cases. Crystallographic analysis confirmed epitaxial growth with in-plane tensile strain, consistent with the 1.7% lattice mismatch between LSCO and SrTiO3 (STO) substrates. In-plane and out-of-plane lattice parameters were determined from asymmetric reciprocal space map (RSM). The in-plane parameter in both films was determined to be 3.91 Å, while the out-of-plane parameter was ca. 3.78 Å. The 16O resonance Rutherford Backscattering (RBS) measurements validated the stoichiometric growth of the thin films. The films grown using the Nd: YAG and excimer lasers exhibited comparable thicknesses.