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<p>This work investigates the application of multi-energy silicon ion implantation followed by annealing in lithium niobate crystals, aiming to explore the performance of optical waveguides and their variations with annealing conditions. Lithium niobate is a key material in integrated optics due to its exceptional electro-optic and nonlinear optical properties. We explore three kinds of silicon ion implantation conditions and annealing treatments at temperatures ranging from 200&#xa0;°C to 800&#xa0;°C to identify the optimal conditions for improving waveguide performance. Comprehensive characterization techniques which were used to measure the refractive index profiles and modal distributions of the waveguides, including prism coupling, end-face coupling, and Raman spectroscopy. The research results indicate that the surface properties of the material change significantly with the increase in annealing temperature. These experimental findings underscore the importance of precise annealing control to defect recovery, offering critical insights for the design of lithium niobate-based optical waveguides.</p>

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Study on annealing behavior by single-energy and multi-energy silicon ion implantation on lithium niobate crystal

  • 期刊论文

  • 发表日期：

    2025年6月12日

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  • Shuo Yan,
  • Jin-Hua Zhao,
  • Yi Zhao,
  • Bo-Yang Li,
  • Wen-Zhuo Zang,
  • Dian Gu,
  • Yi-Cun Yao,
  • Qing-Yang Yue

摘要

This work investigates the application of multi-energy silicon ion implantation followed by annealing in lithium niobate crystals, aiming to explore the performance of optical waveguides and their variations with annealing conditions. Lithium niobate is a key material in integrated optics due to its exceptional electro-optic and nonlinear optical properties. We explore three kinds of silicon ion implantation conditions and annealing treatments at temperatures ranging from 200 °C to 800 °C to identify the optimal conditions for improving waveguide performance. Comprehensive characterization techniques which were used to measure the refractive index profiles and modal distributions of the waveguides, including prism coupling, end-face coupling, and Raman spectroscopy. The research results indicate that the surface properties of the material change significantly with the increase in annealing temperature. These experimental findings underscore the importance of precise annealing control to defect recovery, offering critical insights for the design of lithium niobate-based optical waveguides.