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<p>Employing magnetic multilayers enhances the film’s resistivity and minimizes eddy current loss. Additionally, the magnetic layers are prevented from interacting with each other by using an insulating phase as an interlayer, which could function as a magnetic core to boost the planar inductance. We focus on [Fe<sub>20</sub>Ni<sub>80</sub>-Al<sub>2</sub>O<sub>3</sub>]<sub>n</sub> in multilayer films created on silicon wafers by magnetron sputtering, the effect of cycle number on multilayer magnetic and electrical properties was also investigated. It was revealed that with an increase in the number of cycles, the coercivity decreased from 34.7 Oe to 0.0014 Oe, and the saturation magnetization strength mildly increased from 0.975 T to 1.006 T. The results show that as the escalation in cycle counts increased, the permeability spectra of the magnetic multilayer film’s initial permeability <i>µ</i><sub><i>0</i></sub> increased significantly from 20 to 670, and the resistivity increased significantly from 37.6 µΩ·cm to 121.3 µΩ·cm, leading to notable performance improvements.</p>

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Preparation and properties of high magnetic permeability [Fe20Ni80-Al2O3]n magnetic thin films

  • 期刊论文

  • 发表日期：

    2025年3月11日

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  • Hantao Wang,
  • Yan Zhang,
  • Deyu Yang,
  • Jiaxing Liu,
  • Wen Huang,
  • Bo Dai,
  • Yong Ren,
  • Xiaoyu Li,
  • Min Chen

摘要

Employing magnetic multilayers enhances the film’s resistivity and minimizes eddy current loss. Additionally, the magnetic layers are prevented from interacting with each other by using an insulating phase as an interlayer, which could function as a magnetic core to boost the planar inductance. We focus on [Fe20Ni80-Al2O3]n in multilayer films created on silicon wafers by magnetron sputtering, the effect of cycle number on multilayer magnetic and electrical properties was also investigated. It was revealed that with an increase in the number of cycles, the coercivity decreased from 34.7 Oe to 0.0014 Oe, and the saturation magnetization strength mildly increased from 0.975 T to 1.006 T. The results show that as the escalation in cycle counts increased, the permeability spectra of the magnetic multilayer film’s initial permeability µ0 increased significantly from 20 to 670, and the resistivity increased significantly from 37.6 µΩ·cm to 121.3 µΩ·cm, leading to notable performance improvements.