CdS thin film sensor for NO2 and H2S detection at room temperature
摘要
In this work, CdS thin films were prepared on glass substrates using the chemical bath deposition method. The samples were used as a gas sensor for NO2 in the range of 5–50 ppm and H2S in the range of 10–50 ppm. The sensor was operated at room temperature and activated by UV LED illumination of 395 nm. The morphology, optical, and electrical properties of this nanostructure were examined using scanning electron microscopy, energy dispersive spectroscopy, X-ray diffraction, spectroscopic ellipsometry, UV–Vis spectroscopy and 3D optical profilometry. The films are highly sensitive to NO2 and H2S with a response of 75 and 52% at 50 ppm respectively. Furthermore, they showed good long duration stability and short response/recovery times. The sensor response to NO2 gas increases linearly with increasing gas concentration, while for H2S gas the rate of increase of the sensor response becomes greater from 20 ppm. The results obtained suggest that the developed sensor may have great application potential to detect toxic gases such as H2S and NO2 at room temperature.