X-ray analysis of Ag nanoparticles on Si wafer and influence of Ag nanoparticles on Si nanowire-based gas sensor

Here, the room temperature deposition of silver (Ag) nanoparticles (NPs) on silicon (Si) substrate has been carried out by a simple chemical route to investigate their elastic and micro-structural properties. The theoretical X-ray peak profile analysis has been pursued through the Scherrer model, modified Scherrer model, modified Williamson–Hall model, size–strain plot model and Halder–Wagner model. The X-ray diffraction (XRD) analysis results in the crystalline nature of Ag NPs having nearer dodecahedron structure. The parameters including micro-strain, internal stress and energy density have been estimated for all reflection peaks of XRD. The findings show that the nano-crystalline size (NCS) estimated from all models is in reasonably good agreement. This analysis can pave the way for novel research avenues by comparing the estimated elastic and micro-structural properties of Ag NPs as a potential alternative tool to existing characterization techniques and helpful in fabricating different sizes of Ag–Si nanostructure-based gas-sensing devices. The influence of Ag nanoparticles on Si nanowire towards acetone gas sensor has been studied and achieved remarkable sensitivity 98.77% at 5 MHz frequency with operating temperature at 50 °C.