Enhanced CeO2 evaporation from refractory crucibles (Mo, Ta, W)
摘要
The study is devoted to enhanced CeO2 evaporation in the temperature range between 2130 and 2650 K from refractory crucibles made of different materials: molybdenum, tantalum, and tungsten. The composition datum of vapor and films deposited on collectors receiving evaporation products were obtained by quadrupole mass spectroscopy and by energy-dispersive X-ray spectroscopy. One of approximation coefficients of the temperature dependence of CeO2 vapor in the range between 2150 and 2220 K was measured. The study is of interest for a variety of technologies utilizing refractory oxide evaporation with high productivity, including the plasma mass separation methods.