Scholarlink

<p>Fused silica is widely used in aerospace, semiconductor, and precision optics applications due to its high hardness, excellent optical properties, and superior chemical stability. However, its low ductility and inherent brittleness make the micro-machining of complex structures highly challenging, often resulting in cracks and edge chipping. To address these issues, a multi-edge polycrystalline diamond (PCD) milling cutter (MEMC) was developed and compared against a conventional single-edge PCD cutter (SEMC) under varying milling parameters. The results indicate that at a milling depth below 2&#xa0;μm, the MEMC significantly reduced machining defects, improved groove quality, and achieved a minimum surface roughness of 0.329&#xa0;μm—a 25.14% reduction compared to the SEMC. These findings demonstrate the MEMC’s strong potential for the high-precision machining of complex fused silica components.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Study on micro-milling quality and tool wear of fused silica micro-parts using PCD multi-flute end mills

  • 期刊论文

  • 发表日期：

    2026年7月29日

查看全文
  • Wei Li,
  • Tangyong Cui,
  • Xudong Guo,
  • Chi Shan,
  • Rui Xu

摘要

Fused silica is widely used in aerospace, semiconductor, and precision optics applications due to its high hardness, excellent optical properties, and superior chemical stability. However, its low ductility and inherent brittleness make the micro-machining of complex structures highly challenging, often resulting in cracks and edge chipping. To address these issues, a multi-edge polycrystalline diamond (PCD) milling cutter (MEMC) was developed and compared against a conventional single-edge PCD cutter (SEMC) under varying milling parameters. The results indicate that at a milling depth below 2 μm, the MEMC significantly reduced machining defects, improved groove quality, and achieved a minimum surface roughness of 0.329 μm—a 25.14% reduction compared to the SEMC. These findings demonstrate the MEMC’s strong potential for the high-precision machining of complex fused silica components.