<p>Curved optical components are critical elements in high-power lasers, as their surface quality directly determines the beam quality and operational stability of the laser. To effectively control mid-spatial frequency errors and reduce surface roughness, a structurally-optimized small elastic polishing tool (SEPT) is proposed to meet the required stiffness for polishing while conforming to the curved surface. To accurately predict the surface profile of optical components after polishing and optimize subsequent polishing strategies, precise descriptions of each parameter in the material removal function is essential. Especially, accurately characterizing the contact pressure distribution is a key factor that significantly improves the prediction accuracy of the material removal function although it poses considerable challenges. Therefore, to achieve a more ideal PV value, the finite element method is employed to analyze the radial contact pressure distribution of the SETP. A prediction model is established to describe the radial contact pressure distribution as a function of both the downward force and the tool radius. Subsequently, a contact pressure measurement method is proposed, utilizing a specialized device to compare theoretical and measured values across different radial positions of the SEPT. Finally, experimental validation confirmed its accuracy and applicability. For tools of different sizes, the prediction deviation does not exceed 8.62%. Under varying downward forces, the prediction deviation remains below 10.79%. For tools made of different materials, the prediction deviation is controlled within 10.35%. These multi-faceted deviation results verify that the prediction model exhibits strong generalization capability and reliability under various working conditions. Moreover, it provides powerful data support for its application in relevant engineering practices.</p>

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Contact pressure prediction model for structurally-optimized small elastic polishing tool on curved optical components

  • Xuan Tang,
  • Zhengjiang Song,
  • Kuanglong Xie,
  • Rundong He,
  • Mingsheng Jin

摘要

Curved optical components are critical elements in high-power lasers, as their surface quality directly determines the beam quality and operational stability of the laser. To effectively control mid-spatial frequency errors and reduce surface roughness, a structurally-optimized small elastic polishing tool (SEPT) is proposed to meet the required stiffness for polishing while conforming to the curved surface. To accurately predict the surface profile of optical components after polishing and optimize subsequent polishing strategies, precise descriptions of each parameter in the material removal function is essential. Especially, accurately characterizing the contact pressure distribution is a key factor that significantly improves the prediction accuracy of the material removal function although it poses considerable challenges. Therefore, to achieve a more ideal PV value, the finite element method is employed to analyze the radial contact pressure distribution of the SETP. A prediction model is established to describe the radial contact pressure distribution as a function of both the downward force and the tool radius. Subsequently, a contact pressure measurement method is proposed, utilizing a specialized device to compare theoretical and measured values across different radial positions of the SEPT. Finally, experimental validation confirmed its accuracy and applicability. For tools of different sizes, the prediction deviation does not exceed 8.62%. Under varying downward forces, the prediction deviation remains below 10.79%. For tools made of different materials, the prediction deviation is controlled within 10.35%. These multi-faceted deviation results verify that the prediction model exhibits strong generalization capability and reliability under various working conditions. Moreover, it provides powerful data support for its application in relevant engineering practices.