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<p>Prior to practical application, optical surfaces must be manufactured with high precision in terms of surface form, roughness, and subsurface damage. However, it is quite difficult to simultaneously achieve full frequency band error and damage suppression in conventional optical machining processes. This study presents an integrated manufacturing method based on center-inlet fixed abrasive lapping, center-inlet computer-controlled polishing, and disc hydrodynamic polishing, which allows optical elements to be machined directly from grinding to a smooth surface using integrated equipment and a center-inlet tool. Considering the initial surface form of the workpiece, the material removal function, and the dwell time, a surface form correction theory is established to realize the process integration of the three machining technologies. The experimental results show that the integrated manufacturing technology can process fused silica glass surfaces with a surface PV of 24.3&#xa0;μm and a roughness Sa of 0.8&#xa0;μm to a surface PV of 0.205&#xa0;μm and a roughness Sa of 0.7&#xa0;nm using a single machine. The surface form error convergence rate and surface roughness convergence rate can reach 99.16% and 99.91%, respectively, verifying the feasibility of the integrated manufacturing technology for the full-band error suppression.</p>

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Integrated manufacturing approach: towards full-frequency error suppression on fused silica glass surfaces

  • 期刊论文

  • 发表日期：

    2026年4月16日

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  • Xiangmin Jiang,
  • Bingrui Lv,
  • Bin Lin,
  • Zhongchen Cao,
  • Tianyi Sui

摘要

Prior to practical application, optical surfaces must be manufactured with high precision in terms of surface form, roughness, and subsurface damage. However, it is quite difficult to simultaneously achieve full frequency band error and damage suppression in conventional optical machining processes. This study presents an integrated manufacturing method based on center-inlet fixed abrasive lapping, center-inlet computer-controlled polishing, and disc hydrodynamic polishing, which allows optical elements to be machined directly from grinding to a smooth surface using integrated equipment and a center-inlet tool. Considering the initial surface form of the workpiece, the material removal function, and the dwell time, a surface form correction theory is established to realize the process integration of the three machining technologies. The experimental results show that the integrated manufacturing technology can process fused silica glass surfaces with a surface PV of 24.3 μm and a roughness Sa of 0.8 μm to a surface PV of 0.205 μm and a roughness Sa of 0.7 nm using a single machine. The surface form error convergence rate and surface roughness convergence rate can reach 99.16% and 99.91%, respectively, verifying the feasibility of the integrated manufacturing technology for the full-band error suppression.