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<p>Ternary (TiW)N nitride films were deposited onto cutting tool inserts, SUS 304, and glass substrates by a reactive co-sputtering system. The effect of fabrication parameters (deposition time, N<sub>2</sub>/(Ar + N<sub>2</sub>) flow rate, and annealing treatment) on structure, morphology, mechanical properties, and corrosion resistance was investigated. In addition, dry milling of Inconel 718 with a (TiW)N film-coated tool was also analyzed. The analysis shows that (TiW)N crystallizes in the face-centered cubic structure, corresponding to diffraction along the (111), (200), (220), and (311) planes, with the strongest peak of the (111) plane. The results show that as the deposition time increases, the mechanical and tribological properties as well as the corrosion resistance are enhanced due to the improvement of the crystal quality of the (TiW)N thin film. As the N<sub>2</sub>(Ar + N<sub>2</sub>) flow rate increases from 8% to 16%, the hardness, elastic modulus, and elastic recovery value increase from 17.89 to 23.76 GPa, 120.8 to 139.6 GPa, and 60.49 to 62.72%, respectively. As expected, dry milling performance is improves when the tool has a protective (TiW)N coated film, and the results show that coated tools have a longer service life than uncoated tools. After annealing, an oxide layer forms on the surface, reducing the film’s mechanical properties and corrosion resistance.</p>

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Structure and inconel 718 cutting of (TiW)N films prepared by reactive sputtering

  • 期刊论文

  • 发表日期：

    2026年3月3日

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  • Yu-Kai Shen,
  • Tien-Li Chang,
  • Shu-Ping Wu,
  • Ya-Ge Huang,
  • Chun-Yao Hsu

摘要

Ternary (TiW)N nitride films were deposited onto cutting tool inserts, SUS 304, and glass substrates by a reactive co-sputtering system. The effect of fabrication parameters (deposition time, N2/(Ar + N2) flow rate, and annealing treatment) on structure, morphology, mechanical properties, and corrosion resistance was investigated. In addition, dry milling of Inconel 718 with a (TiW)N film-coated tool was also analyzed. The analysis shows that (TiW)N crystallizes in the face-centered cubic structure, corresponding to diffraction along the (111), (200), (220), and (311) planes, with the strongest peak of the (111) plane. The results show that as the deposition time increases, the mechanical and tribological properties as well as the corrosion resistance are enhanced due to the improvement of the crystal quality of the (TiW)N thin film. As the N2(Ar + N2) flow rate increases from 8% to 16%, the hardness, elastic modulus, and elastic recovery value increase from 17.89 to 23.76 GPa, 120.8 to 139.6 GPa, and 60.49 to 62.72%, respectively. As expected, dry milling performance is improves when the tool has a protective (TiW)N coated film, and the results show that coated tools have a longer service life than uncoated tools. After annealing, an oxide layer forms on the surface, reducing the film’s mechanical properties and corrosion resistance.