Metal micro-hole array processing technologies: research progress, challenges, and future perspectives
摘要
Metal micro-hole array structures are widely distributed with straight-through holes with diameters ranging from 1 μm to 1 mm. These structures play an increasingly important role in aerospace, petrochemical, electronics, automotive energy, precision instrumentation, and printing and textile industries. With the emergence of demanding operating conditions and high-end application requirements, these structures have been subjected to higher requirements in terms of hole-size accuracy, production cost, fabrication efficiency, material utilization, and overall quality. To meet these demands, various innovative processing technologies for micro-hole arrays have been developed and applied. This review summarizes recent advances in the progress of metal micro-hole array structures. Conventional and non-conventional processing techniques are classified, and the major challenges and development trends are systematically analyzed. By comparing the advantages and limitations of different processing technologies, this work discusses low-cost and high-efficiency fabrication pathways for high-performance metal micro-hole array structures and highlights their application prospects.