Vibration-electrolytic composite polishing of 3D microcavity with low-concentration NaNO3 electrolyte containing B4C abrasive
摘要
In this study, B4C (1 µm) particles were added into a low-concentration NaNO3 electrolyte for smooth fabrication of three-dimensional (3D) microcavities through laminated 3D microelectrode vibration-assisted micro-electrochemical machining (micro-ECM); defects like microstripes on the microcavity sidewalls were significantly reduced. The microcavity fabrication process consists of vibration-assisted micro-ECM and microcavity surface abrasive vibration-electrolytic composite polishing. This paper focused on the effects of electrolyte concentration, polishing voltage, and polishing time on microcavity surface roughness. Taking #304 stainless steel workpieces as an example, the results show that the surface roughness of the obtained microcavity was small (Ra 0.171 µm) when the electrolyte concentration, polishing voltage, and polishing time were set to 0.2 g/L, 12 V, and 6 min. Ultimately, square-shaped microcavity, as well as microcavities featuring semicircular and rectangular islands, were successfully produced, all exhibiting high-quality bottom surfaces. Results show that the proposed step process to fabricate 3D microcavities could effectively avoid the sidewall defects while showcasing well-defined grains and grain boundaries. Moreover, the electrochemical corrosion machining technology utilizing a low-concentration NaNO3 solution holds promise for advancing the study of intergranular corrosion in metals.