Research progress on the mechanism and application of water jet-guided laser precision machining
摘要
With the continuous evolution of the aerospace and semiconductor industries, precision machining processes have become increasingly vital. Various studies have shown that water jet-guided laser (WJGL) machining technology overcomes the thermal defects associated with traditional laser processing, while offering high efficiency and excellent quality. Firstly, the comprehensive review of the mechanisms and cutting-edge research on WJGL machining equipment is summarized, including the selection of laser sources in the coupling system, improvements in focusing lenses, energy transfer and distribution issues in the water jet fiber, and the investigation of jet stability. Secondly, the machining mechanism of WJGL is analyzed through theoretical models, empirical models, and numerical simulation models. Then, analyze the cutting-edge applications and process research of WJGL machining technology in metallic materials, semiconductor materials, advanced composite materials, and diamond. Finally, the future development directions of WJGL machining technology are prospected.