Scholarlink

<p>In order to improve the polished surface waviness of the K9 optical substrate, a polishing roller with composite grooves and non-equal groove width structures was evaluated by numerical simulation and experiment. Numerical simulation was conducted to identify hydrodynamic pressure distribution and uniformity; it shows that composite grooves around the polishing roller are conducive to concentrating hydrodynamic pressure and energy bandwidth, while non-equal groove width structures around the polishing roller can largely reduce the distribution range of the hydraulic pressure value from 308.99 down to 48.67 Pa and reduce the standard deviation value from 108.22 down to 16.21 Pa. Thus, a large value and better balanced distribution of hydrodynamic pressure between polishing roller and K9 optical substrate will be better for a uniform removal process and improve polished surface waviness. Experimental results show that the polishing gap, polishing speed, and polishing time have great effects on polished surface waviness. When the roller rotation speed is set to 20,000 rpm, polishing gap to 40 µm, and polishing time to 80 min, the polished surface waviness is optimal with <i>Wa</i>1.01 nm and <i>Wz</i>2.69 nm, and the waviness profile height is controlled within 2.5 nm. Composite and non-equal groove structures around the polishing roller can significantly improve the polished surface waviness of the K9 optical substrate.</p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Effect of polishing roller structures on polished surface waviness in linear hydrodynamic polishing process

  • 期刊论文

  • 发表日期：

    2025年4月24日

查看全文
  • Hongjiao Yu,
  • Donghui Wen,
  • Panyu Qian,
  • Fanzhi Kong,
  • Qiaoling Yuan

摘要

In order to improve the polished surface waviness of the K9 optical substrate, a polishing roller with composite grooves and non-equal groove width structures was evaluated by numerical simulation and experiment. Numerical simulation was conducted to identify hydrodynamic pressure distribution and uniformity; it shows that composite grooves around the polishing roller are conducive to concentrating hydrodynamic pressure and energy bandwidth, while non-equal groove width structures around the polishing roller can largely reduce the distribution range of the hydraulic pressure value from 308.99 down to 48.67 Pa and reduce the standard deviation value from 108.22 down to 16.21 Pa. Thus, a large value and better balanced distribution of hydrodynamic pressure between polishing roller and K9 optical substrate will be better for a uniform removal process and improve polished surface waviness. Experimental results show that the polishing gap, polishing speed, and polishing time have great effects on polished surface waviness. When the roller rotation speed is set to 20,000 rpm, polishing gap to 40 µm, and polishing time to 80 min, the polished surface waviness is optimal with Wa1.01 nm and Wz2.69 nm, and the waviness profile height is controlled within 2.5 nm. Composite and non-equal groove structures around the polishing roller can significantly improve the polished surface waviness of the K9 optical substrate.