<p>Monocrystalline silicon presents significant challenges in precision machining due to its unique crystal structure and chemical properties. To address these challenges, modeling and simulation techniques play a pivotal role in elucidating processing mechanisms, optimizing machining design, and effectively regulating process parameters. This study presents a comprehensive and systematic review of three primary modeling approaches employed in the precision machining of monocrystalline silicon: mathematical analytical models (MAMs), molecular dynamics (MD) models, and finite element method (FEM) models. The novelty lies in the integrated multi-scale perspective, which highlights the unique roles and complementarities of these models in addressing machining complexities across different scales. MAMs are utilized to quantitatively predict cutting forces, surface roughness, and tool wear, providing a basis for process optimization through mechanical behavior analysis. The MD models elucidate the micro-mechanisms of material deformation, surface and subsurface damage, and stress distribution through nanoscale atomic interaction simulations. In contrast, the FEM models simulate macro-mechanical behaviors and thermo-mechanical coupling effects, making it suitable for analyzing material removal and machining stress under complex parameters. Furthermore, potential future directions are outlined, conceivably including the integration of multi-scale modeling techniques and the development of advanced simulation methods. These approaches are expected to enhance the accuracy and applicability of modeling frameworks, which could in turn facilitate progress in the precision processing of monocrystalline silicon.</p>