Study of catalytic properties and grinding performance of single-crystal SiC heterogeneous Fenton reaction grinding discs

To address the challenges associated with the low ultra-precision grinding efficiency of single-crystal SiC, this paper proposes an ultra-precision processing method based on the heterogeneous Fenton reaction. Ceramic-bonded grinding discs were prepared with the heterogeneous Fenton reaction, and the influence of the chemical reaction parameters on the catalytic properties of the discs as well as the grinding effect of single-crystal SiC for different parameters were investigated to elucidate the grinding mechanism. The results indicated that the higher the mass fraction of H₂O₂, the stronger the catalytic properties. The highest material removal rate (MRR) (43.13 nm/min) and the lowest surface roughness (Ra 1.06 nm) were obtained at 20 wt%. Moreover, the lower the pH value, the stronger the catalytic properties of the grinding solution and the larger the MRR; however, the best grinding surface quality was obtained at a pH of 3. The MRR increased with the grinding pressure, and the surface quality was superior at a pressure of 62.4 kPa. The MRR also increased with increasing disc speed, yielding a low surface roughness at a speed of 200 rpm. The mechanical and chemical effects were balanced to improve the surface quality of SiC. The grinding disc obtained via the Fenton reaction oxidised the SiC surface to form an oxide layer of SiO₂; subsequently, the mechanical action of the abrasive removed the oxide layer, exposing a new SiC surface on which oxidation and material removal continue to occur. This cyclical process enabled the efficient grinding of single-crystal SiC.